What kind of grease should be used in semiconductor clean room?
March 26, 2022
In recent years, my country's information industry has achieved amazing development, and the use of bearings, ball screws and linear guides in the semiconductor and liquid crystal manufacturing industries has increased dramatically. In the manufacturing equipment of these products, the grease splashes during the operation of the ball screw and bearing. If it adheres to the crystal product, the product loses its value. Therefore, the need to develop a new type of cleaning grease is increasingly required. . Nowadays, most of the ball screws and bearings of semiconductor and liquid crystal display manufacturing equipment used not only in a vacuum environment but also in a normal pressure environment use vacuum-resistant perfluorinated greases with a small amount of evaporation.
However, general fluorine-based greases use relatively high-viscosity base oils, and are rarely used with rust inhibitors. As a result, it is not suitable for most high-speed bearings, screw rods and guide rails. Especially for the needs of dust-free technology. This shows that clean room greases not only have tribological properties but also meet the special needs of clean technology, such as the number and size of particles. In order to improve these problems, high cleanliness clean room greases with low dust production, high wear and corrosion resistance, and low friction torque are required.
Dust-free properties of high-cleanliness cleanroom greases Particle dispersion behavior and particle size distribution results were determined under standard conditions. A wafer positioning part of a semiconductor inspection equipment is used as a test standard. Many products in industry, such as the microelectronics and optical industries, are becoming increasingly sensitive to particle contamination. In order to reduce particle contamination, this means that products with a high dust-free rating are required. The cleanliness of the production environment during the production process can only be ensured by the production equipment, which generates and releases as little particulate matter as possible. Equipment designed and operated to meet this requirement is based on clean room suitability requirements. Important criteria for high cleanliness cleanroom greases 1. Greatly reduce the wear of lubricating parts 2. Smaller particle dispersion and dripping tendency 3. Tiny gas pollution or volatilization 4. Anti-aging (UV) 5. High resistance to lubricating component materials and environmental media 6. Very few foreign particles
